Microscopy & Metrology
Focused Ion Beam Scanning Electron Microscope (FIB-SEM) - Carl Zeiss AURIGA CrossBeam
The Carl Zeiss AURIGA CrossBeam Focused Ion Beam Electron Microscope is a state-of-the-art advanced scanning electron microscope integrated with high-resolution focused ion beam milling that enables photographic, chemical, and structural analysis of many inorganic and organic samples as well as nanoscale patterning via FIB etching or FIB-driven deposition of metals and insulators from gas-phase precursors. The system also includes TEM lift-out, Oxford EDS system, and Avizo imaging interface/software for 3D reconstruction.
Features
• Focused ion beam (FIB) pattern writing with Nanopatterning & Visualization Engine (NPVE)
• Precise preparation of cross-sectional samples for transmission electron microscopy (TEM)
• 3D tomography: 3D visualization with nanometer-scale resolution
• High resolution Field-emission-SEM and FIB imaging
• Energy-dispersive x-ray spectroscopy to analyze material composition (with nm resolution)
• Gas injection for both etching and deposition of both conducting and insulating materials
Location
Electrical Engineering Cleanroom
Davis Hall, Suite 114
ÃÍÁÏÊÓƵ North Campus
Buffalo, NY 14260
Fees
Usage Fees:
SEM Imaging Only: ACADEMIC RATES
$35/hour unassisted for the first 20 hours of the month
$25/hour unassisted for the second 20 hours of the month
$15/hour unassisted for the third 20 hours of the month
$45/hour with technical assistance
INDUSTRY RATES
$200/hour assisted
$150/hour unassisted (no unassisted use permitted without full training)
Focused Ion Beam: ACADEMIC RATES
$35/hour unassisted for the first 20 hours of the month
$25/hour unassisted for the second 20 hours of the month
$15/hour unassisted for the third 20 hours of the month
$45/hour with technical assistance
INDUSTRY RATES
$400 per hour (no unassisted use permitted w/o full training)
Focused Ion Beam Scanning Electron Microscope (FIB-SEM) - Carl Zeiss AURIGA CrossBeam
For initial inquiries, contact:
Director, Shared Instrumentation Laboratories
(716) 645-5151
For technical inquiries, contact:
Research Assistant Professor
Sr. Research Support Specialist
(716) 645-8698